Product Overview
The TESKZ600 vacuum probe station enables electrical performance measurement of samples under high vacuum and high/low temperature environments. The vacuum chamber is integrally formed, featuring a reasonable design, stable vacuum level, high temperature control accuracy, and high mechanical precision. Depending on the test temperature range, corresponding high-temperature or low-temperature components can be selected. The temperature can reach 10K ~ 325K. The low-temperature part uses a closed-cycle refrigerator cooling assembly (no liquid helium consumption). The vacuum system can be a mechanical pump or molecular pump system, achieving a vacuum level of 10⁻⁵ Pa (depending on the vacuum pump).
It is suitable for temperature-dependent (and atmosphere-dependent) electrical property (e.g., I-V) and optoelectronic property measurements of materials and devices, parameter measurement of semiconductor devices such as light-emitting diodes (LEDs) and field-effect transistors (FETs), dielectric property and RF property measurements of materials. Applicable materials include organic (and inorganic) semiconductors, nanowires (and nanotubes), quantum dots, molecular electronic materials, thin film materials, etc. It is especially suitable for fast, accurate, and non-destructive measurement of tiny (submillimeter to micrometer) devices and device arrays.
Applications
It can be applied to electrical performance testing and analysis of samples under low-temperature or high-temperature vacuum environments, such as in scientific research fields including semiconductor/microelectronics, electronics, electromechanics, physics, chemistry, materials, optoelectronics, nanotechnology, microelectromechanical systems (MEMS), biochips, aerospace, etc., as well as in production and manufacturing fields such as IC design/manufacturing/testing/packaging, LED, LCD/OLED, LD/PD, PCB, FPC, etc.
Technical Parameters
The high-low temperature probe station TESKZ600 is equipped with 4 probe arms that can be finely adjusted. Each probe on the probe arms can be precisely positioned in three dimensions. The probes are made of tungsten alloy to reduce heat conduction from the probes to the sample. Each probe arm is made of 304 high-quality stainless steel and G10, and each probe arm is effectively heat-sinked to reduce heat leakage from the probe arm and thus reduce heat leakage from the probe to the sample. The anti-radiation shield greatly reduces blackbody radiation, improves cooling efficiency, and reduces liquid nitrogen consumption. The sample stage is equipped with a temperature sensor and heater to achieve rapid temperature change and precise temperature control of the sample stage.
- Vacuum sample chamber diameter: Custom
- Chamber vacuum level: 10⁻⁵ mbar
- Chamber leak rate: 1×10⁻⁸ Pa·m³
- Sample stage: 25 mm
- Displacement accuracy: 10 μm
- Probe tip diameter: 1 μm
- Window diameter: 100 mm
- Window material: Fused silica
- Probe arm configuration: 4 probe arms, capable of DC measurement and fiber optic radiation.
- Temperature range: 10K ~ 325K
- Magnetic field strength: 1T
- Temperature control accuracy: 0.1K
- Temperature control system: PID temperature control, PID temperature controller resolution: ±0.1°C, sensor temperature error: 0.5% in any segment, temperature stability better than: ±0.1K
- Sample stage X-Y-Z axis travel ≥12.5mm × 12.5mm, movement accuracy ≤10μm, with vacuum bellows structure
- Sample stage heating power: ≥80W
- Vacuum chamber interface: Equipped with one KF25 vacuum pumping port, one quick vent port, one 6-pin electrical signal interface flange, and one 6-pin electrical signal interface.
- Through vacuum chamber body: X-direction travel 100mm, Y-Z direction travel 12.5mm each, movement accuracy 5μm, high-vacuum electrical interface flange, shielded coaxial cable, probe leakage current: <100fA.
Microscope (1 set)
Zoom range: 0.75~5x, total magnification: 18~150x; working distance: 75mm; light source: LED point light source, brightness adjustable; C-mount interface, microscope focusing bracket: travel 50mm, with coarse and fine adjustment; expansion interface: can add objective lens.
Industrial Camera (1 set)
HDMI output interface, 20 megapixels, 2μm resolution, USB mouse control, USB can be connected to computer software control, equipped with 21-inch monitor (can be discussed)
Sample diameter: 20mm, 10mm, 1mm
Electrode size: 0.3mm
